I'm guessing, though not 100% certain, that EUV uses mirrors and not lenses, alt... | Hacker News

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s0rce on Aug 23, 2021 | parent | context | favorite | on: ASML, a $300B Dutch firm, makes the machines that ...

I'm guessing, though not 100% certain, that EUV uses mirrors and not lenses, although still could be based on glass substrates.

frankchn on Aug 23, 2021 [–]

Yeah EUV uses mirrors, which Zeiss also supplies: https://www.zeiss.com/semiconductor-manufacturing-technology....

There is an introductory PDF presentation from Zeiss about their product for EUVs: https://www.euvlitho.com/2019/P24.pdf

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