Except I'd imagine that most people won't feel the terrorist attack quite so quickly, giving folks likely enough time to recover. If they got bombed up, all the foundries would be fine and can continue production of chips as usual. Of course, the machinery need sophisticated maintenance and replacement parts, but most of those can be produced by non specialist equipment (like normal mills and lathes and stuff for all the mechanical structures). Zeiss plays a big part with the optics and stuff so that would mostly be covered as well.
I think the key is that, the machines that make extremely advanced machines are not that advanced in of themselves.
You don't have to go down that many layers from the machines that foundries use (arguably objects among the very apex of human technology) to bog standard fabrication machines like lathes and mills and whatever they use to cast metal. We have lots of those around the world. It will definitely take a bit of time, but I don't think it will be all that utterly devastating.