I want the people at the top of the agencies that engage in these activities to be charged. I guarantee you when they set up these programs they consulted legal council and they were warned of the possible legal issues that could arise. They chose to ignore those warnings. If by some incredible chance they did not seek council, they were being grossly negligent in carrying out their duties, which resulted in violations of the law and harm to individuals through violation of their human rights. That (gross negligence) is also a crime, at least in the US where I am, so it doesn't matter how you look at it. Those at the top should be held to account for these monumentally bad decisions which have now been deemed illegal.
Government is unique entity - it is a entity 'too big to fail'. And we all know how entities that can not die act.